Products & Systems

Batch Processing System

• High Quality & High Performance Thermal Processing System “TSURUGI-C²^{® ®}”
• High-productivity Batch Processing System “AdvancedAce^®-300”
• Batch High Temperature Anneal Processing System
• Batch Thermal Process System for 200mm Wafers “VERTRON^® Revolution”

Single Wafer Processing System

• Single Wafer Plasma Nitridation / Oxidation System “MARORA^®”
• Single wafer Annealing system “TΛNDUO^®”
• Dry Resist Strip System “Lambda300”

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• Advanced Thermal Process Technology
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