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Batch Processing System

• QUIXACE Batch Thermal Process System for 300mm Wafers
• Batch High Temperature Anneal Processing System
• VERTRON Batch Thermal Process System for 200mm Wafers

Single Wafer Processing System

• MARORA - Single Wafer Plasma Nitridation / Oxidation System
• TΛNDUO - Single Wafer Plasma Dry Strip System

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