Products & Systems

Batch Processing System

• High Quality & High Performance Thermal Processing System “TSURUGI-C²^{® ®}”
• High-productivity Batch Processing System “AdvancedAce^®-300”
• Batch High Temperature Anneal Processing System
• Batch Thermal Process System for 200mm Wafers “VERTRON^® Revolution”

Single Wafer Processing System

• Single Wafer Plasma Nitridation / Oxidation System “MARORA^®”
• Single wafer Annealing system “TΛNDUO^®”
• Dry Resist Strip System “Lambda300”

Other

• Advanced Thermal Process Technology
• Group Company Products
• Service Support
• Training Center
s

Corporate Information

• Greetings from the President
• Corporate Data
• Headquarters / works / group companies
• Corporate Profile841KB

CSR Information

• CSR Report
• Supplementary Data for CSR Report
• GRI Content Index249KB

• News Releases
• Contact Us
• Using the Site
• Privacy Policy