- *1
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Abbreviation for Wafer Fab Equipment.
- *2
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Abbreviation for Gate All Around.
- *3
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We refer to a technique for thin-film deposition at an atomic layer level involving a process of cyclical supply of multiple gases as “ALD”.
- *4
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Abbreviation for Process of Record. Refers to the certification of equipment used in
semiconductor manufacturing processes.
- *5
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Abbreviation for Low Pressure Chemical Vapor Deposition.