Products &
Systems

Advanced Thermal Process Technology

Overview

  • Excellent Step Converage
  • KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD).
    The BCD technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

    *BCD is a registered trademark of KOKUSAI ELECTRIC CORPORATION.

    Process Applications
    • Dielectric Films Process (Plan)

Features

  • Excellent step coverage
  • Precise Film Property Control
  • Low Temperature Deposition
  • Good uniformity
  • Low Contamination