Advanced Thermal Process Technology
KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD® technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.
*BCD is a registered trademark of KOKUSAI ELECTRIC CORPORATION in Japan.
- Excellent step coverage
- Precise Film Property Control
- Low Temperature Deposition
- Good film thickness uniformity
- Low Contamination