Products &
Systems

Advanced Thermal Process Technology

Overview

  • Excellent Step Converage
  • KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
    The BCD® technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

    *BCD is a registered trademark of KOKUSAI ELECTRIC CORPORATION in Japan.

Features

  • Excellent step coverage
  • Precise Film Property Control
  • Low Temperature Deposition
  • Good film thickness uniformity
  • Low Contamination