Products &
Systems

Single wafer Annealing system “TΛNDUO®

Overview

  • product image
    *TΛNDUO is a registered trademark of KOKUSAI ELECTRIC CORPORATION.
  • TΛNDUO® provides an optimized system for the process such as curing, annealing and degassing by module selection.
    We have achieved great productivity and low particle process environment with our original high-speed wafer transfer system.

    Process Applications
    • Low temp Annealing
    • Curing

Features

  • Achieved high throughput with our original high-speed wafer transfer system
  • Achieved highly uniform temperature control capability within wafer using our original susceptor heater
  • Low contamination level
  • Small footprint, high tool up-time
  • Global tool sales record as a high throughput single wafer annealing system by high productivity