Batch Thermal Process System for 200mm Wafers “VERTRON® Revolution”
KOKUSAI ELECTRIC’s “VERTRON® Revolution” is a latest version of proven VERTRON® 200mm Batch Diffusion/LPCVD systems.
Customer would be able to choose optimum VERTRON® system from mass production to many models production in small quantities. Flexible wafer diameter such as 150mm is ready.
*VERTRON is a registered trademark of KOKUSAI ELECTRIC CORPORATION.
- Process Applications
- LP CVD
- Anneal (High Temp. / Low Temp.)
- Built on a proven VERTRON® platform with compatibility of wafer process among past models
- Upgraded to new hardware to enable high productivity utilized latest 300mm tools designs
- Larger batch size (175wafers) and small batch size for low height ceiling (100wafers) (Option)
- Atmosphere control is available for oxygen and moisture sensitive process (lower oxygen & H2O concentration) (Option)
- Controllers have been upgraded to latest architecture based systems and it gives better system performance and much low risk of parts supply discontinuation in the future