Products &
Systems

VERTRON Batch Thermal Process System for 200mm Wafers

Overview

  • product image
  • KOKUSAI ELECTRIC's Vertron-III series Batch Diffusion/LPCVD systems have been developed specifically for processing 200mm wafers predominantly used in high-volume semiconductor device manufacturing. The Vertron-III platform offers solid reliability and superior cost of ownership (CoO).

    *VERTORON is a registered trademark of KOKUSAI ELECTRIC CORPORATION.

    Process Applications
    • LP CVD
    • Oxidation
    • Anneal (High Temp. / Low Temp.)
    • Diffusion

Features

  • High throughput, large batch (150Wafers)
  • Reduced cycle time, optional fast ramp heater element which also lowers thermal budget
  • Vacuum load lock available for oxygen and moisture sensitive process (lower oxygen & H2O concentration) (Option)
  • User friendly GUI main system controller