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Kokusai Electric Semiconductor Service Inc.

High Band Ultrasonic Series, Single frequency oscillation type.

High Band Ultrasonic Series

Use for cleaning of

  • Cleaning of semiconductor.
  • Cleaning of photomask.
  • Final cleaning of bare wafer.
  • Jig for semiconductor manufacture.

Highly precise output power control.

Because highly precise output feedback control at entire area of output setting range is performed, output stability in low output for miniaturisation of semiconductor is stabilized drastically. By this, the damage to the semiconductor device can reduce more.

Fixed frequency.

Ultrasonic transmissivity of quartz tank is always constant because the oscillating frequency is constant.

High efficiency and compact design.

A 15% reduce of power consumption was achieved from our conventional model by adoption of power factor corrector. The volume ratio reduced 30% from our conventional model, the mass reduced 30%, too.

UO1200PMCX Series

UO1200PMCX Series
Model UO1200PMCX
Oscillation mode Single frequency
Rating output power 1200Watts
Output adjustment range 3 to 1200Watts
Frequency 730kHz 1MHz
Remort control Possible
Power supply Single phase AC200V~230V±10% 50/60Hz
Current consumption 10A
External dimensions(mm) 360(W)×150(H)×480(D)
Mass 14kg or less
Regulatory Approvals CE・FCC ※1・Semi-F47

※1 Noise filter [Model FB001 sold separately] is necessary for FCC conformity.